高純六氟化硫
|
產品規格 |
99.995% |
99.999% |
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|
氧氣(O2)+ 氮氣(N2) |
≤10ppm |
≤2ppm |
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|
四氟化碳(CF4) |
≤1ppm |
≤0.5ppm |
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|
六氟乙烷(C2F6) |
≤1ppm |
/ |
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|
八氟丙烷(C3F8) |
≤1ppm |
≤1ppm |
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|
SO2F+SOF2+S2F10O |
≤1ppm |
≤1ppm |
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|
甲烷 (CH4)
|
/ |
≤1ppm |
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|
一氧化碳(CO) |
/ |
≤1ppm |
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|
二氧化碳(CO2) |
/ |
≤1ppm |
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|
水(H2O) |
≤2ppm |
≤1ppm |
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|
露點（℃） |
≤-62℃ |
≤-69℃ |
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|
酸度(As HF) |
≤0.2ppm |
≤0.1ppm |
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|
可水解氟化物(As HF) |
≤1ppm |
≤0.8ppm |
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|
礦物油 |
≤1ppm |
N/D |
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